JPH0735674Y2 - レーザ加工装置における外部ミラー装置 - Google Patents
レーザ加工装置における外部ミラー装置Info
- Publication number
- JPH0735674Y2 JPH0735674Y2 JP1988063967U JP6396788U JPH0735674Y2 JP H0735674 Y2 JPH0735674 Y2 JP H0735674Y2 JP 1988063967 U JP1988063967 U JP 1988063967U JP 6396788 U JP6396788 U JP 6396788U JP H0735674 Y2 JPH0735674 Y2 JP H0735674Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- spacer ring
- external mirror
- laser beam
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 claims description 39
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
- Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988063967U JPH0735674Y2 (ja) | 1988-05-17 | 1988-05-17 | レーザ加工装置における外部ミラー装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988063967U JPH0735674Y2 (ja) | 1988-05-17 | 1988-05-17 | レーザ加工装置における外部ミラー装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01172489U JPH01172489U (en]) | 1989-12-06 |
JPH0735674Y2 true JPH0735674Y2 (ja) | 1995-08-16 |
Family
ID=31289450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988063967U Expired - Lifetime JPH0735674Y2 (ja) | 1988-05-17 | 1988-05-17 | レーザ加工装置における外部ミラー装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0735674Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008112938A (ja) * | 2006-10-31 | 2008-05-15 | Mitsubishi Electric Corp | レーザ装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6165418U (en]) * | 1984-10-01 | 1986-05-06 |
-
1988
- 1988-05-17 JP JP1988063967U patent/JPH0735674Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01172489U (en]) | 1989-12-06 |
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